منابع مشابه
Novel Resist Materials for next Generation Lithography
........................................................................................................................................................ ii Acknowledgments ....................................................................................................................................... iii Publications............................................................................
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ژورنال
عنوان ژورنال: Journal of Micro/Nanolithography, MEMS, and MOEMS
سال: 2007
ISSN: 1932-5150
DOI: 10.1117/1.2826725